We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer a) Schematic illustration of the ceramic-MEMS cantilever fabrication sequence based on SU-8 micromolds, b) Full wafer (100-mm) micro/macro-molds with the...Continue Reading