Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer

a) Schematic illustration of the ceramic-MEMS cantilever fabrication sequence based on SU-8 micromolds, b) Full wafer (100-mm) micro/macro-molds with the sacrificial layer, c) A micro-gear mold filled by polyureasilazane and cured

Fakhfouri, V ; Jiguet, S ; Brugger, J

Advances in Science and Technology, vol. 45, 2006, p. 1293-1298

Présenté à: CIMTEC 2006 (11th International Conferences on Modern Materials and Technologies), Sicily, Italy , 4-9 June, 2006.

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