Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Gersteltec Engineering Solutions
Swiss Made SU-8 photoepoxy functional products for MEMS, LIGA and Microelectronics

Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts

The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper

Evolution with time of the coefficient of friction under a normal load of 2 N for Inox balls, B and M different concentration of silica filler in SU8.

Jiguet, S ; Judelewicz, M ; Mischler, S ; Bertsch, A. et al.

Microelectronic Engineering, vol. 83, 2006, p. 1273-1276

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