High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates

Leroy, Christine ; Pisani, Marcelo B. ; Hibert, Cyrille ; Bouvet, Didier et al.

Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006, 2006
Présenté à: DTIP 2006, Stresa, Italy, April 2006.

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