In this paper, a survey is made of some technologies in which the photo-definable polymer is used as structural material and where physical properties of polymers are modified to change porosity, mechanical or electrical properties. The paper is organized in three sections: (a) 2D, multilayer photopolymers, (b) High aspect ratio and (c) 3D micro-stereolithography technologies. In addition the authors mention some development in which photo-polymerization is used to locally create special structures.
Renaud, P ; Metz, S ; Jiguet, S ; Bertsch, A
BOSTON TRANSDUCERS’03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, p. 991-994
Présenté à: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, BOSTON, MASSACHUSETTS, JUN 09-12, 2003.