We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer Fakhfouri, V ; Jiguet, S ; Brugger, J Advances in Science and Technology, vol. 45, 2006, p. 1293-1298 Présenté à: […]
Jiguet, S. ; Bertsch, A. ; Judelewicz, M. ; Hofmann, H. et al. Microelectronic engineering, vol. 83, 2006, p. 1966-1979 Full text
The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper Jiguet, S ; Judelewicz, M ; Mischler, S ; Bertsch, A. et al. Microelectronic Engineering, vol. 83, 2006, p. 1273-1276 Full text
The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures Jiguet, S. ; Judelevicz, M. ; Mischler, S. ; Hofmann, H. et al. Surface & coatings technology, vol. 201, num. 6, 2006, p. 2289-2295 Full text
Leroy, Christine ; Pisani, Marcelo B. ; Hibert, Cyrille ; Bouvet, Didier et al. Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006, 2006Présenté à: DTIP 2006, Stresa, Italy, April 2006. Full text
A conductive composite photoresist has been developed for the direct photopatterning of electrodesA conductive composite photoresist has been developed for the direct photopatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conduc- tivity at a low silver content of around 6 […]
The present thesis deals with new composite photoresists for the UV-LIGA and microstereolithography microfabrication processes. Jiguet, Sébastien ; Renaud, Philippe Lausanne: EPFL, 2004. Full text
The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. The technique uses heat-depolymerizable polycarbonates embedded in polyimide or SU-8 for the generation of microchannels and sealed cavities. The volatile decomposition products originating from thermolysis of the sacrificial material escape out of the embedding material by diffusion […]
This paper describes new polymer/ceramic photosensitive resins that can be used in the microstereolithography process for manufacturing complex 3D components in composite material. These new resins contain high loads (up to 80 wt.%) of alumina nanoparticles, used as fillers in a photosensitive acrylate-based resin of low viscosity. With the nanopowder-filled resin we developed, various small […]
Microstereolithography is a technique that allows the manufacture of small and complex three-dimensional (3D) components in plastic material. Many of the components produced by this technique are too small and too complex to be replicated by molding and, consequently, the produced components need to have adequate mechanical or chemical characteristics to be useful. Until now, […]
