The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures Optical images of wear traces left by steel balls on (a) SU8, (b) SU8 after heat treatment, (c) A composite, (d) composite A after heat treatment, (e) B composite,...Continue Reading

Schematic cross section of the fabrication process for horizontal plane inductors in quartz package. Leroy, Christine ; Pisani, Marcelo B. ; Hibert, Cyrille ; Bouvet, Didier et al. Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006, 2006Présenté à: DTIP 2006, Stresa, Italy, April 2006. Full textContinue Reading

A conductive composite photoresist has been developed for the direct photopatterning of electrodesA conductive composite photoresist has been developed for the direct photopatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conduc- tivity at a low silver content of around 6...Continue Reading

The present thesis deals with new composite photoresists for the UV-LIGA and microstereolithography microfabrication processes. Jiguet, Sébastien ; Renaud, Philippe Lausanne: EPFL, 2004. Full textContinue Reading

The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. The technique uses heat-depolymerizable polycarbonates embedded in polyimide or SU-8 for the generation of microchannels and sealed cavities. The volatile decomposition products originating from thermolysis of the sacrificial material escape out of the embedding material by diffusion...Continue Reading

This paper describes new polymer/ceramic photosensitive resins that can be used in the microstereolithography process for manufacturing complex 3D components in composite material. These new resins contain high loads (up to 80 wt.%) of alumina nanoparticles, used as fillers in a photosensitive acrylate-based resin of low viscosity. With the nanopowder-filled resin we developed, various small...Continue Reading

Microstereolithography is a technique that allows the manufacture of small and complex three-dimensional (3D) components in plastic material. Many of the components produced by this technique are too small and too complex to be replicated by molding and, consequently, the produced components need to have adequate mechanical or chemical characteristics to be useful. Until now,...Continue Reading

Composite materials offer a combination of properties and adiversityofapplications,whichcannotbeobtainedwith metals, ceramics or polymers alone. In particular, the inser- tion of a conductive phase (metallic or inorganic powders or conductive polymers) in an insulating polymer matrix, can result in an enhancement of its electrical conductivity. Var- iousstudieshavebeenfocusedonsuchelectricallyconduc- tive polymer composition (ECPCs), which do not have the...Continue Reading

A new electrically conductive photosensitive composite resist has been formulated and used to build microcomponents. This composite material is based on the SU-8 photopolymer, an insulating negative-tone photoresist, in which silver nano-particles have been dispersed to enhance the electrical properties of the polymer. The properties of this new photosensitive composite have been characterized by optical...Continue Reading

Microstereolithography is a technology at the interface of the microengineering and rapid prototyping domains. It has evolved from the stereolithography technique, and is also based on a light-induced layer- stacking manufacturing, As the resolution of the microstereolithography technique is far better than the one of rapid prototyping technologies, this technique is of particular interest in...Continue Reading