Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Switzerland
Switzerland
info@gersteltec.ch +41 (0)79 564 34 23 General-Guisan 26, 1009 Pully, Switzerland CH
enfrdezhja
Gersteltec Engineering Solutions
Swiss Made SU-8 photoepoxy functional products for MEMS, LIGA and Microelectronics

3-dimensional free standing micro-structures by proton beam writing of SU8 silver nanoParticle polymeric composite

Proton beam lithography a maskless direct-write lithographic technique (well suited for producing 3-Dimensional microstructures in a range of resist and semiconductor materials) is demonstrated as an effective tool in the creation of electrically conductive freestanding micro-structures in an Su 8 + Nano Silver polymer composite.

a) 3 Dimensional freestanding cantilever structure created by 1.0 and 2.5MeV proton beams on a 75micron thick layer of 15% Ag/Su8 nano-composite. 4b) Test pillars structure created by 2.5MeV proton beams on a 75micron thick layer of 15% Ag/Su8 nano-composite

H. Igbenehu and S. Jiguet

Materials Science and Engineering 40 (2012)012002, Date: 2012,