Proton beam lithography a maskless direct-write lithographic technique (well suited for producing 3-Dimensional microstructures in a range of resist and semiconductor materials) is demonstrated as an effective tool in the creation of electrically conductive freestanding micro-structures in an Su 8 + Nano Silver polymer composite.

H. Igbenehu and S. Jiguet
Materials Science and Engineering 40 (2012)012002, Date: 2012,