Proton beam lithography a maskless direct-write lithographic technique (well suited for producing 3-Dimensional microstructures in a range of resist and semiconductor materials) is demonstrated as an effective tool in the creation of electrically conductive freestanding micro-structures in an Su 8 + Nano Silver polymer composite. a) 3 Dimensional freestanding cantilever structure created by 1.0 and...Continue Reading
Abstract—A new type of scintillation detector is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by coupling microfluidic channels filled with a liquid scintillator to photodetectors Top view of the microfluidic scintillation detector. A. Mapelli, B. Gorini, M. Haguenauer, S. Jiguet, N. Vico Triviño, and P. Renaud:...Continue Reading
SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip Fabrication process of a suspended SU-8 structure for a monolithic closed SU-8 microchannel. a A standard SU-8 layer...Continue Reading
We report a process for the realization of polyimide films with custom-designed microporosity based on the heat-induced depolymerization of polyimide-embedded polypropylene carbonate microstructures. SEM cross-section views of fabricated arrays of microcavities in a PI layer: (a) 30 μm wide voids; (b) 80 μm wide voids; (c) PI layer stack encompassing two levels of cavities; (d) a zoom...Continue Reading
A novel type of particle detector based on scintillation, with precise spatial resolution and high radiation hardness, is being studied Mapelli, A.a b , Gorini, B.b , Haguenauer, M.c , Jiguet, S.d , Miotto, G.L.b , Vandelli, W.b , Triviño, N.V.a , Renaud, P.a Sensors and Actuators, A: Physical0924Continue Reading
A new ultiwalled carbon nanotubes (MWCNTs)/SU8 composites have been produced to enhance the mechanical properties of SU8 photoresist TEM (left) and HRSEM (right) micrographs of a repre- sentative composite showing a good dispersion of MWCNTs. Marijana Mionic, Sebastien Jiguet, Moshe Judelewicz, Ayat Karimi, Laszlo Forro, and Arnaud Magrez Phys. Status Solidi B, 1–4 (2010)Continue Reading
This paper presents the study of a novel scintillation detector based on standard microfabrication techniques. Fabrication of SU-8 microchannels Mapelli, A. ; Gorini, B. ; Haguenauer, M. ; Jiguet, Sébastien et al. Présenté à: Eurosensors XXIII conference, Lausanne, Switzerland, September 6-9, 2009 Procedia Chemistry, vol. 1, num. 1, 2009, p. 1347-1350 Full textContinue Reading
A novel liquid scintillation detector with high spatial resolution is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by filling microfluidic channels with an organic liquid scintillator and optically coupled to a pixellated photodetector. Such a microfluidic device can be designed and processed to meet the requirements...Continue Reading
