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Polyimide foam-like microstructures: technology and mechanical properties J A Dobrzynska1,3,4, P Joris1,4, S Jiguet2, P Renaud1 and MAM Gijs, J. Micromech. Microeng. 21 (2011) We report a process for the realization of polyimide films with custom-designed microporosity
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Suspended SU-8 structures for monolithic microfluidic channels Y. Moser • R. Forti • S. Jiguet • T. Lehnert • M. A. M. Gijs, Microfluid Nanofluid (2011) 10:219–224 SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip.[...]
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Development and Studies of Novel Microfabricated Radiation Hard Scintillation Detectors With High Spatial Resolution A. Mapelli, B. Gorini, M. Haguenauer, S. Jiguet, N. Vico Triviño, and P. Renaud: IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 58, NO. 3, JUNE 2011 Abstract—A new type of scintillation detector is being developed with standard microfabrication techniques. It consists of a dense array of scintillating waveguides obtained by coupling microfluidic channels filled with a liquid scintillator to photodetectors[...]
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Study of the mechanical response of carbon nanotubes-SU8 composites by nanoindentation Marijana Mionic´1, Se´ bastien Jiguet, Moshe Judelewicz, Ayat Karimi1, La´ szlo´ Forro´ 1, A new ultiwalled carbon nanotubes (MWCNTs)/SU8 composites have been produced to enhance the mechanical properties of SU8 photoresist.[...]
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Scintillation particle detection based on microfluidics Mapelli, A.a b , Gorini, B.b , Haguenauer, M.c , Jiguet, S.d , Miotto, G.L.b , Vandelli, W.b , Triviño, N.V.a , Renaud, P.a In: Sensors and Actuators, A: Physical 0924 A novel type of particle detector based on scintillation, with precise spatial resolution and high radiation hardness, is being studied.[...]
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Preparation and characterizatiom of SU8-carbon nanotube composites Marijana Mionic ; Sebastien Jiguet; Moshe Judelewicz; Laszlo Forro
and Arnaud Magrez In: Phys. Status
Solidi B 246, A novel SU8–carbon nanotube composites have been produced toenhance the mechanical, electrical, and thermal properties of SU8 photoresists.[...]
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Novel radiation hard microfabricated scintillation detectors with high spatial resolution
Mapelli, A. ;
Gorini, B. ;
Haguenauer, M. ;
Jiguet, Sébastien et al. In: Nuclear Instruments and
Methods in Physics Research section A, 2009 A novel liquid scintillation detector with high spatial resolution is being developed with standard microfabrication techniques. [...] |
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SU-8 microfluidic device for scintillating particle detection
Mapelli, A. ;
Gorini, B. ;
Haguenauer, M. ;
Jiguet, Sébastien et al. Présenté à: Eurosensors XXIII
conference, Lausanne, Switzerland, September 6-9, 2009. This paper presents the study of a novel scintillation detector based on standard microfabrication techniques. [...]
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Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds
Fakhfouri, V ; Jiguet, S ; Brugger, J In: Advances in Science and Technology, vol. 45, 2006, p. 1293-1298
We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. [...]
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SU-8 nanocomposite coatings with improved tribological performance for MEMS
Jiguet, S. ;
Judelevicz, M. ;
Mischler, S.
; Hofmann, H. et al. In: Surface & coatings technology, vol. 201, num. 6, 2006, p. 2289-2295
The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures. [...]
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Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts
Jiguet, S ;
Judelewicz, M ;
Mischler, S ;
Bertsch, A.
et al. In: Microelectronic Engineering, vol. 83, 2006, p. 1273-1276
The use of low-stress SU8 nanocomposites as a functional material for micro-parts and coating applications is described in this paper [...]
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SU-8 nanocomposite photoresist with low stress properties for microfabrication applications
Jiguet, S. ;
Bertsch, A. ;
Judelewicz, M.
; Hofmann, H. et al. In: Microelectronic engineering, vol. 83, 2006, p. 1966-1979
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Conductive SU8 Photoresist for Microfabrication
Jiguet, Sébastien ; Bertsch, Arnaud ; Hofmann, Heinrich ; Renaud, Philippe In: Advanced Functional Materials, num. 15, 2005, p. 1511-1516
A conductive composite photoresist has been developed for the direct photopatterning of electrodes [...]
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SU8-silver photosensitive nanocomposite
Jiguet, S ; Bertsch, A ; Hofmann, H ; Renaud, P In: ADVANCED ENGINEERING MATERIALS, vol. 6, num. 9, 2004, p. 719-724
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Microfabrication of ceramic components by microstereolithography
Bertsch, A ; Jiguet, S ; Renaud, P In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 14, num. 2, 2004, p. 197-203
Microstereolithography is a technique that allows the manufacture of small and complex three-dimensional (3D) components in plastic material. [...]
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Ceramic microcomponents by microstereolithography
Bertsch, A ; Jiguet, S ; Hofmann, H ; Renaud, P In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, p. 725-728
This paper describes new polymer/ceramic photosensitive resins that can be used in the microstereolithography process for manufacturing complex 3D components in composite material. [...]
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Conductive SU8-silver composite photopolymer
Jiguet, S ; Bertsch, A ; Hofmann, H ; Renaud, P In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, p. 125-128
A new electrically conductive photosensitive composite resist has been formulated and used to build microcomponents. [...]
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Polyimide and SU-8 microfluidic devices manufactured by heat-depolymerizable sacrificial material technique
Metz, S ; Jiguet, S ; Bertsch, A ; Renaud, P In: LAB ON A CHIP, vol. 4, num. 2, 2004, p. 114-120
The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. [...]
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Microstereolithography: a review
Bertsch, A ; Jiguet, S ; Bernhard, P ; Renaud, P et al. In: RAPID PROTOTYPING TECHNOLOGIES, vol. 758, 2003, p. 3-15
Microstereolithography is a technology at the interface of the microengineering and rapid prototyping domains. [...]
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Composite photopolymer microstructures: From planar to 3D devices
Renaud, P ; Metz, S ; Jiguet, S ; Bertsch, A In: BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, p. 991-994 |
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2.
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Microfabrication d'objets composites fonctionnels en 3D et à haut facteur de forme, par procédés UV-LIGA et microstéréolithographie
Jiguet, Sébastien ;
Renaud, Philippe Lausanne : EPFL, 2004.
The present thesis deals with new composite photoresists for the UV-LIGA and microstereolithography microfabrication processes. [...]
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High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates
Leroy, Christine ; Pisani, Marcelo B. ; Hibert, Cyrille ; Bouvet, Didier et al. In: Proceedings of the 2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006, 2006 |